GB/T 28632-2012 in English

VALID

Surface chemical analysis—Auger electron spectroscopy and X-ray photoelectron spectroscopy—Determination of lateral resolution

Issued on:2012-07-31
Implemented on:2013-02-01
File Format:PDF
Delivery:Via email within 1~3 business days

Price(USD)： $330.00
$321.00

Standard No:	GB/T 28632-2012
Document status:	VALID
Title in English:	Surface chemical analysis—Auger electron spectroscopy and X-ray photoelectron spectroscopy—Determination of lateral resolution
Title in Chinese:	表面化学分析俄歇电子能谱和X射线光电子能谱横向分辨率测定
Language:	English
File Format:	Electronic (PDF)
Delivery:	Via email within 1~3 business days
Issued on:	2012-07-31
Implemented on:	2013-02-01
ICS Classification:	71.040.40-Chemical analysis
Chinese Classification:	G04-Basic standards and general methods
Professional Classification:	GB-National Standard
Related Keywords:	surface chemical analysis auger electron spectroscopy x-ray photoelectron spectroscopy determination lateral resolution x-ray photoelectron spectrometer lateral resolution scopethis standard
Related Topics:	Mass spectral peak resolution X-ray Photoelectron Spectroscopy and Auger Electron Spectroscopy Resolution of Mass Spectrometry Auger spectrum x-ray electron spectroscopy Auger electrons and x-ray photoelectrons Auger Electron Spectroscopy X-ray Photoelectron Spectroscopy Auger spectroscopy and photoelectron spectroscopy Resolution of mass spectral peaks energy spectrum Auger Electronics X-ray Photoelectron Spectroscopy+ X-ray photoelectron spectroscopy Electron Spectroscopy Auger Electron Spectroscopy horizontal resolution X-ray spectrum of plutonium Gold X-ray Spectroscopy Mass spectral peak resolution MS resolution How does mass spectrometry resolve X-ray Spectroscopy and X-ray Photoelectron Spectroscopy Auger spectrum Auger Electron Spectroscopy 1 Auger Quadrupole MS Resolution Chemical Analysis Electron Spectrometer Auger Electron Spectroscopy Standard X-ray Spectroscopy and Electron Spectroscopy xps and aes First-order mass spectrometry resolution ray photoelectron spectroscopy photoelectron spectroscopy x-ray spectroscopy use X-ray photoelectron spectrometer X-ray Electron Microscopy Spectroscopy Mass spectrum peak resolution; Mass Spectrometry Resolution Electron Spectrum High Resolution Mass Spectrometry What analysis is used for x-electron spectroscopy surface energy spectrum x-ray electron spectroscopy Chromatographic resolution Applications of Auger Electron Spectroscopy Auger Electron Spectrum of Cobalt Spectral resolution detection Sensitivity of Auger Electron Spectroscopy Photoelectric Spectroscopy x-ray and auger electrons Auger electron spectrometer surface x-ray electron energy aes or xps First-order spectral resolution Auger Electron Spectroscopy X-ray Spectroscopy and x-ray photoelectron spectroscopy X-ray Photoelectron Spectroscopy mass spectrometric resolution Auger spectroscopy X-ray photoelectron spectroscopy test. spectral line Auger photoelectron spectroscopy data x-ray electron spectroscopy X-ray Photoelectron Spectroscopy Auger Electron Spectroscopy Quadrupole MS Resolution Auger electrons and x-rays Electron Photoelectron Spectroscopy Auger electron beam Spectral resolution x-ray electron spectroscopy Auger spectrum How to measure spectral resolution Auger Spectroscopy line spectrum Electron microscope + electron spectroscopy X-ray photoelectron spectrometer and Auger spectrometer Auger Electron Spectroscopy x-ray auger X-ray and ultraviolet photoelectron spectroscopy Center Auger Electronics electron x-ray Spectroscopy and Auger Electron x-electron spectroscopy X-ray Photoelectron Spectroscopy and Ultraviolet Photoelectron Spectroscopy Electronic Auger Electric Female low resolution mass spectrometry electron microscopy electron spectroscopy Quadrupole MS Resolution The resolution of the first order spectrum MS low resolution Can Auger Electron Spectroscopy Detect Lithium? Auger Test Myu Electron Spectrum x Chromatographic Resolution Seconds X-ray Photoelectron Spectroscopy Sample Preparation X-ray photoelectron spectroscopy and its applications Auger electron spectrum resolution Electron spectroscopy and spectrometers Auger Electronics x-ray photoelectron spectroscopy Spectral Resolution Measurements Secondary electron resolution x-ray optoelectronics auger electrons Auger spectrometer, X-ray photoelectron spectrometer Optoelectronics Auger Electron Spectroscopy Results surface spectrum What is the resolution of mass spectrometry? Current Spectral Resolution X-ray electron spectroscopy mass spectrum horizontal and vertical lines electronic wire Auger resolution Mass Spectrometer Resolution Auger Peak resolution in mass spectrometry Mass Quadrupole Resolution Optical Resolution Measurement Spectral measurement resolution electron spectrum energy x-ray Auger spectrum Spectral resolution detection Spectral resolution detection How to detect spectral resolution electronic surface analysis Measuring Auger How to determine the resolution of mass spectrometry Electron Spectroscopy Applications X-ray Auger Electron Spectroscopy spectral resolution X-ray Auger Electron Spectroscopy Auger Electronics and Optoelectronics electron ray spectrum Auger Electron Standard Spectroscopy Auger Electron Spectroscopy spectral line x-ray photoelectron Multispectral resolution energy spectrum x-ray x-ray resolution Mass Spectrometry Resolution Resolution energy spectrum Parameter resolution aes+ Auger Electron Spectroscopy Tritium Electron Spectroscopy Spectral Energy Analysis X-ray Energy Spectroscopy Qualitative Analysis Basis 4 Applications of Auger Electron Spectroscopy Photoelectron Spectroscopy Applications Auger Sputtering Resolution Mass Spectrometer The lower the spectral resolution Quantitative Analysis Electronics x Spectrometer analysis resolution X-ray Auger Electron Spectrometer Spectral direction energy spectrum Auger Electron Spectroscopy Sample Preparation Spectral Resolution Measurements X-rays and Auger photoelectron energy Auger Electron Spectroscopy Laboratory How to analyze Auger electron spectroscopy Auger Electron Spectroscopy Ion Sputtering Auger Electron Spectroscopy and X-rays Auger electrons and x-rays spectrum electron auger electronics and x x-ray high-energy electron beam Auger electron peak Electron Spectroscopy and Energy Spectroscopy Auger Electron Spectrum Box Electrical Correction Photoelectron Spectroscopy and Auger Electrons Mass spectral resolution half peak How to Calculate Infrared Spectral Resolution Auger Electron Spectroscopy aes photoelectron spectroscopy surface Auger Electron Spectroscopy in Thin Films Auger spectrum Cobalt Auger Electron Spectroscopy Auger Electron Spectroscopy Quantitative Analysis UV photoelectron spectroscopy Energy Electron Spectroscopy Auger Electron AES Spectrum 2 Absolute Spectral Resolution Photoelectron Spectroscopy and Auger Electron Spectroscopy AES Auger Electron Spectrum Peaks How to correct Auger spectrum To the molecule and spectrum Resolution of Quadrupole Mass Spectrometry Electron Spectroscopy Quantitative Analysis characteristic x-ray spectroscopy Spectrum and Kim Auger resolution chemistry Directional Spectrometer Electron Spectroscopy Auger electrons and secondary electrons electron x-ray spectrum Photoelectron Spectroscopy Applications High Energy Electron Beam Auger Electrons Auger electrons of lithium Auger electron resolution high resolution electron energy Instrument resolution Electron Spectroscopy and Electron Probes Auger Electron Spectroscopy X-ray Photoelectron Spectroscopy Applications Measurement of Spectral Resolution reverse photoelectron spectroscopy reverse photoelectron spectroscopy Electron Spectrum- Auger Photoelectron Spectrometer X-ray Photoelectron Spectroscopy Applications How Auger Electronics Auger Electron Spectroscopy Auger Electron Spectroscopy Quantitative Analysis Auger electron x-ray X-ray Spectroscopy Sample Preparation X-ray spectroscopy data Auger electron spectrum resolution Spectral Surface Analysis Auger Electron Spectroscopy Surface surface electron spectroscopy Auger Electron Spectroscopy Sputtering high energy x-ray high energy electron beam Surface Energy Spectroscopy Auger Electron Spectroscopy Experiment Auger Electron Spectroscopy Analysis Report Energy Spectrum and Wave Spectrum Auger Electron Spectroscopy Experiment Why are Auger Electron Surfaces Sensitive x-ray spectroscopy in water Auger electrons and x-rays x-rays and auger electrons Can Auger Electron Spectroscopy detect Argon? even mass spectral resolution Electron Spectroscopy t2 energy spectrum analysis General Rules of X-ray Photoelectron Spectroscopy Analysis Methods Electron spectroscopy samples x-ray analysis resolution Auger Electron Quantitative Analysis energy spectrum of spectrum X-ray Photoelectron Spectroscopy Laboratory Photoelectron spectroscopy sample preparation Photoelectron spectroscopy sample preparation Secondary electron resolution Surface Atomic Energy Spectroscopy x spectrum X-ray photoelectron spectrometer sample preparation Secondary Spectral Resolution Forward Spectrum and Reverse Spectrum Quantitative Analysis of Auger Electron Spectroscopy X-ray Electron Spectroscopy Applications Auger Electronics Applications Auger+ Electronics Auger Electron Spectrum of Iron Auger Electron Surface Low Resolution Mass Spectrometry Forward Spectrum Reverse Spectrum X-ray Electron Spectroscopy Applications Iron Auger Electron Spectroscopy Forward Spectrum Reverse Spectrum Forward Spectrum and Reverse Spectrum Forward Spectrum + Reverse Spectrum Auger electron + x-ray instrument resolution Why is the spectral resolution Auger Effect Auger Electron Spectroscopy differential spectrum Auger electron intensity x-ray spectroscopy lithium Mass peak + resolution Analysis of titanium surface by energy spectrometer Auger Electron Spectroscopy Auger Surface Analysis Electron Spectroscopy Applications Spectral Spectral Resolution Resolution of Auger Electron Spectroscopy Electron Spectroscopy Quantitative Analysis Auger electron resolution What does Auger Electron Spectroscopy detect? High Energy X-ray Photoelectron Spectroscopy Russian Association Spectrum Spectral resolution Secondary Electron Spectrum Auger Electron Spectroscopy vs X-rays Auger electron beam Auger rays Electron Spectroscopy Why Auger Electron has High Resolution Auger electron energy Photoelectron spectroscopy can detect those Atomic resolution The resolution of the electron spectrum x-ray photoelectron spectroscopy xps energy spectrum and aes energy spectrum Single Electron Spectroscopy x-ray photoelectron spectroscopy resolution X-ray photoelectron spectroscopy Transmission Spectroscopy atomic surface chemistry Auger Electron Surface Electron Spectroscopy X-ray Photoelectron Spectroscopy Qualitative analysis of energy spectrum characteristic x-ray spectroscopy Photoelectron spectroscopy test Material Spectroscopy Photoelectron energy Auger semiquantitative analysis X-ray photoelectron spectroscopy sample preparation method X-ray Photoelectron Spectroscopy Sample Analysis Sample Preparation for X-ray Photoelectron Spectroscopy Electron and X-ray photoelectron spectroscopy How to determine the Auger electron peak in x-ray photoelectron spectroscopy x-ray electron energy Characteristic x-ray and energy spectroscopy High Resolution Mass Spectrometry spectral line X-ray photoelectron spectrometer sample x-ray photoelectron spectroscopy and x-ray x X-ray photoelectron spectroscopy and x-rays How to prepare samples for X-ray photoelectron spectrometer x-ray and x-photoelectron photoelectron, ray, analysis, sample X-ray photoelectron spectroscopy sample preparation requirements X-ray electron spectroscopy sample preparation X-ray Photoelectron Spectroscopy Sample Preparation Auger electron sensitivity Characteristic x-ray and energy spectrum analysis Spectral direction atomic resolution Field Auger Electron Spectroscopy Auger ion Secondary Electrons and Auger Electrons multiresolution analysis Energy Spectrum Analysis Auger Electron Spectroscopy and X-rays Auger electronic name Auger Electron Spectroscopy Surface Quantitative Analysis How to prepare samples for X-ray photoelectron spectrometer How to prepare samples for X-ray photoelectron spectrometer Auger Electronics Secondary Electronics Secondary Electronic Auger Electron Horizontal resolution detection xresolution How to Determine Mass Spectrometry Resolution Auger Spectrum+ Sample analysis by electron spectroscopy x-ray photoelectron spectroscopy Qualitative analysis of energy spectrum Auger Electronics Secondary Electronics Auger electrons and secondary electrons Secondary electrons and Auger electrons Auger Electron Spectroscopy Requirements Spectral analysis resolution x-ray spectroscopy resolution electron x-ray Auger electronic signal UV photoelectron and X-ray photoelectron spectroscopy Auger Electron Spectroscopy Rays xps and aes electrons in x-ray atoms resolution peak Spectral Analysis and Energy Spectrum Analysis X-ray spectroscopy sample preparation Auger Electron Optoelectronics Secondary Electronics Auger electrons and x-ray photoelectrons Secondary Electronic Auger Electron x-ray molecular spectroscopy x-ray photoelectron energy Spectrum of each electron x-ray spectrometer Detection Analysis of X-ray Photoelectron Spectroscopy electron+x-ray X-ray Photoelectron Spectroscopy+ Applications X-ray photoelectron spectroscopy test Auger Electron Spectroscopy Surface Inspection horizontal scan Energy X-ray Spectroscopy and X-ray Spectroscopy Spectral Orientation Analysis Auger peak Parameter resolution Auger Electron Quantitative Analysis Energy Spectrum Analysis electron energy x-ray Detection resolution Horizontal resolution detection Chromatographic resolution and mass spectral resolution What does Auger Electron Spectroscopy measure? X-ray photoelectron spectroscopy and mass spectrometry Photoelectron spectroscopy and X-ray spectroscopy Spectrum Electron Spectroscopy Electron Microscopy - Electron Spectroscopy Detection resolution How to Measure Auger Electrons multi-energy spectrum x-ray tube Chromatographic peak resolution Various electron spectra Auger Spectrum of Cobalt Molecular Spectroscopy III horizontal resolution Electron Dispersion Spectroscopy How to semi-quantitatively analyze the Auger peak Spectrum + spectral line Electron and x-ray energy rod mass resolution UV Photoelectron Spectroscopy and X-ray Photoelectron Spectroscopy Auger Peak Quantitative Analysis x-ray resolution X-ray Spectroscopy Phase Analysis Auger x-ray energy spectrum rays Spectrum x parameter resolution X-ray Photoelectron Spectroscopy Samples Spectrum and Energy Spectrum Chromatographic peak + resolution + X-ray Photoelectron Spectroscopy Sample Preparation Which resolution is higher between secondary electrons and Auger electrons? Auger electron quantity Spectrum x Electron Spectrum X-ray photoelectron spectroscopy detection sample Auger spectrometer resolution Spectroscopy resolution Aphid Auger Electron Spectroscopy Applications of X-ray Photoelectron Spectroscopy Auger electron peak spectral rays What does x-ray photoelectron spectroscopy measure? How to calculate the resolution of infrared spectrum UV photoelectron spectroscopy What can X-ray spectroscopy analyze? How to analyze Auger spectrum spectral line How to analyze by X-ray energy spectrometer X-ray spectroscopy applications transverse spectroscopy Spectral Energy Analysis Secondary Electron Energy Auger Electron Energy Auger Electron Spectroscopy Sample Preparation Material Spectroscopy and Energy Spectroscopy Auger Electron Spectroscopy for samples X-ray Spectroscopy Electron Spectroscopy Sample Preparation Requirements for X-ray Photoelectron Spectroscopy How to analyze Auger Electronics Auger Spectroscopy Quantitative Analysis x-photoelectron spectroscopy sample preparation Auger Electronic Sample Preparation How to measure spectral resolution Gold Auger Electronics Titanium Auger Analysis GBT28632 High resolution spectrum and low resolution spectrum Mass spectrometry sensitivity and resolution Resolution of ion mobility spectroscopy Can W and Au be distinguished using a spectrometer? Spectral resolution test method Optical resolution test Single molecule localization super-resolution method Auger Electron Spectroscopy Charges

《GB/T 28632-2012表面化学分析俄歇电子能谱和X射线光电子能谱横向分辨率测定》由TC38（全国微束分析标准化技术委员会）归口，TC38SC2（全国微束分析标准化技术委员会表面化学分析分会）执行，主管部门为国家标准化管理委员会。

Scope

This standard specifies the method for measuring the lateral resolution of Auger electron spectrometer and X-ray photoelectron spectrometer under three conditions. The straight-edge method is suitable for instruments with expected lateral resolutions greater than 1 µm. The grid method is suitable for instruments whose lateral resolution is expected to be greater than 20nm and less than 1μm. The Golden Island rule applies to instruments with expected lateral resolutions less than 50nm. Appendix A, Appendix B and Appendix C give examples of band diagrams for measuring lateral resolution.

More samples: JJG 21-2008 YD/T 3934-2021 QC/T 942-2021

Sample only — not a preview of GB/T 28632-2012

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