GB/T 31227-2014 in English

VALID

Test method for the surface roughness by atomic force microscope for sputtered thin films

Issued on:2014-09-30
Implemented on:2015-04-15
File Format:PDF
Delivery:Via email within 1~3 business days

Price(USD)： $150.00
$146.00

Standard No:	GB/T 31227-2014
Document status:	VALID
Title in English:	Test method for the surface roughness by atomic force microscope for sputtered thin films
Title in Chinese:	原子力显微镜测量溅射薄膜表面粗糙度的方法
Language:	English
File Format:	Electronic (PDF)
Delivery:	Via email within 1~3 business days
Issued on:	2014-09-30
Implemented on:	2015-04-15
Professional Classification:	GB-National Standard
Related Keywords:	atomic force microscope surface roughness test method thin films scopethis standard thin films
Related Topics:	atomic force microscope Ultrafast Atomic Force Microscopy Surface roughness atomic force For Atomic Force Microscopy What does an atomic force microscope measure? Atomic Mechanical Microscopy Atomic Mechanical Microscopy atomic microscope atomic microscope atomic microscope Microscope measurement Thin film density measurement Frontiers in Atomic Force Microscopy Atomic Energy Microscopy What does an atomic force microscope detect Atomic Mechanics Microscopy Atomic Force Microscopy Substrates roughness microscope atom What does an atomic force microscope measure? 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Atomic force microscope sample Membrane surface roughness AFM Surface Roughness What kind of film is used for rough surface Surface Roughness of Sputtering Target Sample preparation method for atomic force microscope Crystal Phase AFM Kelvin atomic force microscope Thin film stress measurement xps surface atoms Microgram mass measurement method and principle How to prepare samples for atomic force microscope Atomic Force Microscopy Measurements Phases of Atomic Force Microscopy What does an atomic force microscope use How to use the microscope: Several modes of atomic force microscope AFM cells Film Surface Roughness How a Microscope Measures Depth atomic force roughness Thin Film Density Measurement Method my atomic force microscope Microscope measurement method Fast Atomic Force Microscopy How much is an atomic force microscope Atomic Force Microscopy Sample Preparation tension and roughness GB/T 31227-2014 General Atomic Force Microscopy Field Lens Measurement Method The first atomic force microscope gb/t+31227 Microscopic measurement length foreign atomic force microscope Atomic AFM Thin film stress measurement Atomic Force Microscopy Samples Surface Microsystem atomic trace calcium hTrace atoms afm atomic force microscope sample preparation Atomic Force Microscopy Magnetic Domains microscope height Two Methods of Electron Microscopy Sample preparation for atomic force microscopy rough surface How to prepare samples for atomic force microscope? 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Atomic Microscope Measurements Principles of Microscopy Atomic Force Microscopy Cell Samples Atomic Mechanical Microscopy Sample Preparation atomic force microscope Film Surface Roughness surface principle method Why Atomic Force Microscopy GBT31227 GB/T 31227-2014 Two-dimensional microscope measurement method Ion sputtering principle Atomic force roughness Atomic force microscopy potential Atomic force microscope voltage MFP-3D-BIO atomic force microscope Atomic force microscope roughness meaning Oxford Instruments Atomic Force Microscope Microroughness Atomic force microscope tapping mode distance Atomic force microscope sample requirements Domestic atomic force microscope Application scope of atomic force microscope Microscopic surface roughness test method Film roughness testing Roughness processing method Laser microscope for measuring roughness Roughness processing method Principles and methods of using microscopes Roughness processing method How to make a microscope Atomic force microscopy test methods High Definition Measurement Tool Microscope Measurement Method Microscope surface roughness testing Release film roughness measurement method Methods for measuring the roughness of curved surfaces Atomic force microscopy application test methods Staining methods for electron microscopy Melt pool microscopy measurement method Microscopic roughness measurement Preparation method of thin film samples for transmission electron microscopy Disadvantages and improvements of electron microscopes Film roughness test method Microinjection is a physical method Atomic force microscope charges Electron microscopy specimen preparation methods atomic force microscope Coating film roughness measurement method Flour thickness measurement method Simple measurement method of roughness How to use a microscope How to use a microscope Atomic force microscope refrigeration method gb 31227 How to adjust the microscope Surface roughness testing method How to use the microscope Microscopy Method Steps

《GB/T 31227-2014原子力显微镜测量溅射薄膜表面粗糙度的方法》由TC279（全国纳米技术标准化技术委员会）归口，主管部门为中国科学院。
本标准规定了使用原子力显微镜(AFM)测量表面粗糙度的方法。
本标准适用于测量溅射成膜方法生成的、平均粗糙度Ra 小于100nm 的薄膜。
其他非溅射薄膜的表面粗糙度的测量可以参考此方法。

Scope

This standard specifies a method for measuring surface roughness using an atomic force microscope (AFM). This standard is applicable to the measurement of thin films produced by sputtering film formation method with an average roughness Ra of less than 100 nm. The measurement of surface roughness of other non-sputtered films can refer to this method.

More samples: JJG 21-2008 JC/T 2453-2018 DL/T 368-2010

Sample only — not a preview of GB/T 31227-2014

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