GB/T 1555-2009 in English
SUPERSEDEDTesting methods for determining the orientation of a semiconductor single crystal
- Issued on:2009-10-30
- Implemented on:2010-06-01
- File Format:PDF
- Delivery:Via email within 1~3 business days
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《GB/T 1555-2009半导体单晶晶向测定方法》由TC203(全国半导体设备和材料标准化技术委员会)归口,TC203SC2(全国半导体设备和材料标准化技术委员会材料分会)执行,主管部门为国家标准化管理委员会。
本标准规定了半导体单晶晶向X 射线衍射定向和光图定向的方法。
本标准适用于测定半导体单晶材料大致平行于低指数原子面的表面取向。
Scope
This standard specifies the methods for X-ray diffraction orientation and optical pattern orientation of semiconductor single crystals. This standard applies to the determination of the surface orientation of semiconductor single crystal materials approximately parallel to the low-index atomic plane.

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